Fabrication Engineering at the Micro and Nanoscale (Heftet)

Serie: The Oxford Series in Electrical and Computer Engineering 

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Innbinding: Heftet
Utgivelsesår: 2012
Antall sider: 688
Forlag: Oxford University Press Inc
Språk: Engelsk
Serie: The Oxford Series in Electrical and Computer Engineering
ISBN/EAN: 9780199861224
Omtale: Fabrication Engineering at the Micro and Nanoscale
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

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