Chemistry and Lithography (Innbundet)

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Forfatter:
Innbinding: Innbundet
Utgivelsesår: 2011
Antall sider: 862
Forlag: John Wiley & Sons Inc
Språk: Engelsk
ISBN/EAN: 9781118030028
Kategori: Teknologi, transport og landbruk
Omtale: Chemistry and Lithography
This book provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a wide readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time. This book is a useful reference for anyone working in the semiconductor industry.

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