EUV Lithography (Innbundet)


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Innbinding: Innbundet
Utgivelsesår: 2009
Antall sider: 700
Forlag: John Wiley and Sons Ltd
Språk: Engelsk
ISBN/EAN: 9780470471555
Kategori: Teknologi, transport og landbruk
Omtale: EUV Lithography
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

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