Glow Discharge Processes (Innbundet)

Sputtering and Plasma Etching

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Innbinding: Innbundet
Utgivelsesår: 1980
Antall sider: 432
Forlag: John Wiley and Sons Ltd
Språk: Engelsk
ISBN/EAN: 9780471078289
Omtale: Glow Discharge Processes
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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