Wafer Fabrication (Innbundet)

Automatic Material Handling System

Forfatter:

Forfatter:
Innbinding: Innbundet
Utgivelsesår: 2018
Antall sider: 284
Forlag: De Gruyter
Språk: Engelsk
ISBN/EAN: 9783110486902
Kategori: Teknologi, transport og landbruk
Omtale Wafer Fabrication
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

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